Author Topic: SEM, Sputter Coater, Maskless and E-beam Lithography  (Read 1437 times)


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SEM, Sputter Coater, Maskless and E-beam Lithography
« on: February 04, 2014, 11:08:18 AM »
I've got some interesting things comming to the lab and the nearby areas. Below are a few projects some of you may be interested in that will add to the value of the space greatly

I am looking for anyone that wants to take this scanning electron microscope head that has the lenses chamber and stage as well as the electron gun and see if we can get it up and in working order. There are wires going everywhere all connected to cables with pins. Going to take some research and troubleshooting, but ultimately if we could get the whole thing to be controlled by arduinos and whatever other electronics needed that would be awesome. I hope to turn this into an E-beam lithography machine. First step is to take everything apart and look at the insides. I will hold a meeting discussing how they work and more details where we can tear the thing apart. Let me know if you are interested and what days would work for you

I also have an entire SEM complete with vacuums and attachments, all the electronics, power supplies etc coming in soon. I dont know if EVERYTHING is complete, but it will be fun to inspect and see if we can get it working and cleaned up. If we can get this thing operational the lab will have an electron microscope. This is nothing short of badass. If you see Dav3 around tell him thanks for covering shipping! If you are interested in helping get this thing functional let me know!!!

I also have another roughing pump and diffusion pump, as well as rf power for rf sputtering, vacuum gagues and controllers and a plethora of other things to make a sputter coater with. It needs some plumbing, so if you know anything about valves, flanges, high vacuums, high voltage, heating elements, or anything to do with sputtering or want to learn let me know and we can all work on this project. If you know of any cheap sources for stainless steel hoses or bell jars let me know (alternatively there is a HUGE bell jar in Jupiter a guy is willing to let me have for $400 if we can pick it up)

I also have a projector we could throw a mercury lamp in for some maskless lithography, if anyone wants to help set that up it could alternatively be used as a steriolithography 3d printer!

I plan on holding meetings for each or all of these projects, so let me know if you are interested in taking part in them. If you just want to learn how to use them after we get them up and running I will be holding classes by summer hopefully!


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Re: SEM, Sputter Coater, Maskless and E-beam Lithography
« Reply #1 on: February 04, 2014, 11:41:37 AM »
I've used an SEM back during the 'ol college days, so I'm totally down for helping getting it operational  :)


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Re: SEM, Sputter Coater, Maskless and E-beam Lithography
« Reply #2 on: February 04, 2014, 02:54:44 PM »
I know not of the details of an SEM, but I'm fairly good with mechanical/electronic things. We also have an SEM at my office, so maybe some knowledge can be gained by looking at another (probably not similar though) model. Count me in for some!